Laser oscillation apparatus

摘要

A laser oscillation apparatus includes: a laser cavity unit for generating laser light by being provided a voltage and optically amplifying the generated light by means of a pair of mirrors; and a DC power source for supplying the voltage required for generating the laser light to a pair of discharge electrodes of the cavity unit. Each of a cathode and an anode of the DC power source is grounded via a grounding resistor. The laser apparatus includes a cooled mirror holder and a heater for the coolant.