发明名称 |
SYSTEM AND METHOD FOR PRODUCING BUBBLE FREE LIQUIDS FOR NANOMETER SCALE SEMICONDUCTOR PROCESSING |
摘要 |
A system for producing bubble free liquid includes a continuous liquid source and a de-bubbling chamber. The de-bubbling chamber includes an outlet and an inlet. The inlet coupled to an outlet of the continuous liquid source by a supply pipe. The de-bubbling chamber also includes at least one port in a sidewall of the de-bubbling chamber. The at least one port being at least a length L from the inlet of the de-bubbling chamber. A method for producing bubble free liquid is also described. |
申请公布号 |
KR20080031222(A) |
申请公布日期 |
2008.04.08 |
申请号 |
KR20077030723 |
申请日期 |
2006.06.12 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
WOODS CARL;FARBER JEFFREY J. |
分类号 |
B01D19/00 |
主分类号 |
B01D19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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