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发明名称
Method and apparatus for manufacturing an interconnect structure
摘要
申请公布号
KR100818902(B1)
申请公布日期
2008.04.04
申请号
KR20027013890
申请日期
2002.10.17
申请人
发明人
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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