| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to efficiently, selectively and easily provide an electric conductor inside a hole, a concave portion, a groove or the like which is fine and has a high aspect ratio by using supercritical fluid irrespective of a grounding material. SOLUTION: While arranging under an atmosphere containing the supercritical fluid a processed body 16 in which a concave portion 15 providing an electric conductor 21 is formed and a metallic compound 18 containing a metal 20 which is used as a principal component of the electric conductor 21, at least a part of the metallic compound 18 is dissolved in the supercritical fluid. While contacting the metallic compound 18a dissolved in the supercritical fluid with a front surface of the processed body 16 and selectively introducing the metallic compound 18a into the concave portion 15, the metallic compound 18a introduced into the concave portion 15 is flocculated within the concave portion 15 to deposit the metal 20 from the metallic compound 18a. The electric conductor 21 is provided in the concave portion 15 by solidifying the metal 20 deposited within the concave portion 15. COPYRIGHT: (C)2008,JPO&INPIT
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