| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device capable of quickly adapting to the shape of a substrate when inspecting a plurality of substrates of different shapes. SOLUTION: A substrate holding device 1 comprises a base member 2, first and second movable holding members 3, 4 arranged along an X direction so that they can come near to and depart from each other, third and fourth movable holding members 5, 6 arranged along a Y direction so that they come near to and depart from each other, first and second position adjusting mechanisms 7, 8 for adjusting the positions of the first and third movable holding members 3, 5, first and second bias mechanisms 9, 10 for biasing the second and fourth movable holding members 4, 6 to the side of the first and third movable holding members 3, 5 in opposition thereto, and first and second drive mechanisms 11, 12 for driving the second and fourth movable holding members 4, 6 so that they depart from the first and third movable holding members 3, 5 against the bias force of the first and second bias mechanisms 9, 10. COPYRIGHT: (C)2008,JPO&INPIT
|
