LASER WORKING APPARATUS

摘要

Provided is a laser working apparatus (100) for emitting a plurality of laser beams simultaneously through a plurality of f? lenses thereby to work simultaneously a plurality of works placed on one working table. The laser working apparatus (100) comprises a dislocation calculating unit (33) for calculating the positional dislocation of each work and correcting the positional dislocation of the work thereby to set the correction value of the movement of the working table in accordance with a working method, a dislocation deciding unit (34) for selecting the working method according to the positional dislocation from a plurality of preset kinds of working methods, and a control unit (21) for working and controlling the works on the working table by using a correcting value according to the working method. In case any work is outside of the working range of the f? lens and in case the difference of the positional dislocation between the individual works is smaller than a predetermined value, the dislocation calculating unit (33) sets the correction value so that all works may fall within the working range of the f? lens, and the dislocation deciding unit (34) selects a simultaneous working method for irradiating all works with the laser beams thereby to perform the simultaneous working of all works.