| 摘要 |
PROBLEM TO BE SOLVED: To provide waste water treatment after removing toxicity of a PFC (perfluorocarbon) gas for use in manufacturing of a semiconductor, a liquid crystal and an electronic component, particularly a recycling method of a fluorine compound in waste water, and an apparatus therefor. SOLUTION: The treatment method of fluorine-containing waste water comprises a process of loading the fluorine-containing waste water with Ca-based alkali to adjust pH to 6 to 10; a crystallization process of loading the pH-adjusted fluorine-containing waste water with a fluoroapatite particle as a crystallization accelerator, adsorbing to deposit calcium fluoride and silicofluoride on the surface of the fluoroapatite particle, and carrying out insoluble separation; and a process of introducing a treated material obtained in the crystallization process into a fluid bed type seed crystal filled tank including an immersion type membrane separation apparatus on the top and aeration means on the bottom, discharging water separated by membrane separation operation outside a system while aerating, and on the other hand, depositing to grow calcium fluoride and silicofluoride in the treated material. COPYRIGHT: (C)2008,JPO&INPIT
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