| 摘要 |
PROBLEM TO BE SOLVED: To prevent erroneous determination of disconnection or short circuit of a circuit pattern accompanying steep variation of a detected signal due to non-sticking area to an inspection substrate or variation of the capacity coupling by a recessed part formed in a stage mounting surface for mounting the inspection substrate in a circuit pattern inspection device. SOLUTION: The circuit pattern inspection device performs electric capacity coupling of a sensor electrode for inspection to the circuit pattern in a non-contact manner, and determines goodness/badness of a plurality of circuit patterns by the detected signal. Grooves and holes formed in the stage mounting surface for mounting the inspection substrate having the circuit patterns are arranged so as to provide the same capacity coupling to each circuit pattern. Alternatively, by rounding or tapering an edge parts of the grooves and holes, the steep variation of the detected signal received for adjacent circuit patterns is moderated, and the variation of the threshold calculated based on the detected signal used for goodness/badness determination is corrected so as to follow the variation of the detected signal to prevent the incorrect determination. COPYRIGHT: (C)2008,JPO&INPIT
|
