APPARATUS AND METHOD FOR VISUAL INSPECTION, HEIGHT MEASURING METHOD, AND CIRCUIT BOARD MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a visual inspection apparatus and a visual inspection method capable of measuring accurately and speedily measuring even relatively small members having a level difference to their surroundings such as a pin or a tip part of a terminal. SOLUTION: The visual inspection apparatus (1) comprises a light source part (2) for projecting a periodic gray-scale pattern in a prescribed direction to an object to be inspected; an imaging part (3) for acquiring a plurality of inspection images acquired by projecting the gray-scale pattern as displacing it in the prescribed direction prescribed amount by prescribed amount and photographing the object to be inspected; a phase image generating means (51) for generating a phase image indicating the amount of displacement of the phase of the gray-scale pattern on the basis of the plurality of inspection images; a position specifying means (52) for specifying the position of at least one section to be measured of the object to be inspected on the basis of the phase image or a positioning image acquired by photographing the object to be inspected; and a height measuring mean (53) for measuring the height of the at least one section to be measured on the basis of a pixel value of the phase image corresponding to the specified at least one section to be measured. COPYRIGHT: (C)2008,JPO&INPIT