| 摘要 |
PROBLEM TO BE SOLVED: To provide a boron-diffused mono crystal silicon vibrator that can be stably formed with less fluctuation in shape. SOLUTION: The vibrator used in a vibration type sensor includes a substrate and a diffused area formed by diffusing boron into the substrate with a gap provided between the substrate and the diffused area. COPYRIGHT: (C)2008,JPO&INPIT
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