| 摘要 |
PROBLEM TO BE SOLVED: To provide an absolute pressure sensor capable of easily measuring the absolute pressure with a high precision and a high resolution. SOLUTION: The absolute pressure sensor is constituted of: a first diaphragm having the first recessed part on one side of principal surface, first and the second thick wall parts part on the other principal surface a second recessed part with the terminal part, through holes passing through both the principal surfaces; a second diaphragm formed on one principal surface with a third recessed part; a pair of vibration beams extending parallelly; basic end parts connected with both the ends of the vibration beams respectively; and a+ twin tuning fork type piezoelectric vibration element formed by the driving electrodes formed on the surface of the vibration beams. The absolute pressure sensor is constituted such that both the base end parts of the twin tuning fork type piezoelectric vibration element are connected to the first and the second thick wall parts of the first diaphragm, the second recessed part of the first diaphragm and the recessed part of the second diaphragm are connected oppositely, and the inside of the recessed part is evacuated to the vacuum. COPYRIGHT: (C)2008,JPO&INPIT
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