APPARATUS OF MANUFACTURING SEMICONDUCTOR APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus of manufacturing a semiconductor apparatus without using a stepper in a manufacturing process when semiconductor apparatus are produced in high volume using a substrate having a large area. SOLUTION: By selectively radiating a laser beam to a thin film formed on a substrate having an insulated surface via a light control means, in particular, via an electro-optic apparatus and by generating ablation, the thin film is partially removed, and the remaining region of the thin film is made in a predetermined shape. The electro-optic apparatus inputs an electrical signal based on a design CAD data of a semiconductor apparatus to function as a variable mask. COPYRIGHT: (C)2008,JPO&INPIT