| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system and an inspection method which can detect the three-dimensional shape of cream solder. SOLUTION: A lighting apparatus 5 irradiates a substrate on which the cream solder is applied with a plurality of infrared rays having different intensity. A photographing apparatus 6 photographs the substrate irradiated with the infrared rays for each intensity of the infrared rays, thereby allowing to acquire a plurality of images having different intensity of the infrared rays irradiated on the substrate and detect the three-dimensional shape of the cream solder on the basis of the images. In accordance with the internal condition of the cream solder, a substrate is carried out, or a warning is issued, thereby preventing a substrate on which defective cream solder is applied from being carried out. COPYRIGHT: (C)2008,JPO&INPIT |
