| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VAN DE KERKHOF, MARCUS, ADRIANUS;DE BOEIJ, WILHELMUS, PETRUS;VAN GREEVENBROEK, HENDRIKUS, ROBERTUS, MARIE;KLAASSEN, MICHEL, FRANSOIS, HUBERT;KOK, HAICO, VICTOR;WEHRENS, MARTIJN, GERARD, DOMINIQUE;UITTERDIJK, TAMMO;ROOIJAKKERS, WILHELMUS, JACOBUS, MARIA;KUIPER, JOHANNES, MARIA;VAN DOOREN, LEON;SONNEVELD, JACOB;GILING, ERWIN, JOHANNES, MARTINUS |
