A calibrated microelectromechanical microphone

摘要

A MEMS microphone comprising a MEMS transducer having a back plate and a diaphragm as well as controllable bias voltage generator providing a DC bias voltage between the back plate and the diaphragm. The microphone also has an amplifier with a controllable gain, and a memory for storing information determining a bias voltage to be provided by the bias voltage generator and the gain of the amplifier.