PIN FOR FIXING SUBSTRATE, APPARATUS FOR CHUCK INCLUDING THE PIN, APPARATUS FOR CLEANING SUBSTRATE HAVING THE CHUCK

摘要

A fixing pin, a chuck having the same, and a cleaning apparatus including the chuck are provided to easily perform maintenance operation by replacing only a protection member. A body(21) supports a bottom surface of a substrate, and a guide(22) is formed on the body to guide a side of the substrate, so that the substrate is loaded on the body. A protection member(24) is detachably mounted on the guide, and comes in contact with the substrate. The guide has an eccentric axis offset to a rotation axis of the body. The guide has a first recessed portion, and the protection member has a second recessed portion engaged with the first recessed portion.