GATE VALVE OF VACUUM PROCESSING APPARATUS

摘要

A gate valve is provided to uniformly maintain airtightness and minimize dependence on a cylinder by preventing the particles generated in a vacuum chamber from penetrating a gate valve. A sealing plate(120) is prepared near the open/close hole of a vacuum chamber, controlling the open/close hole. A pair of sub plates(130) are coupled to the sealing plate. A cylinder moves up and down the sub plate, connected to the pair of sub plates. An elevation member(160) supports and elevates the sub plate, disposed at the right and left sides of the cylinder. A pressure member connects the air injected from the outside and the elevation member to horizontally transfer the sealing plate. A pair housings(110) are coupled to the vacuum chamber wherein the elevation member and the pressure member are built in the pair of housings. The elevation member can be surrounded and shielded by a bellows that interconnects the sub plate and the housing.