IMAGE SENSOR AND FABRICATION METHOD THEREOF

摘要

An image sensor and a manufacturing method thereof are provided to improve sensitivity of a device by not forming a gap between neighboring lenses constituting a micro lens array. A lower structure has plural photodiodes and a wiring. A micro lens array(21a) is formed on the lower structure to focus an incident light on the photodiode. Neighboring lenses disposed in the horizontal direction and the vertical direction have a zero gap therebetween, and a gap or space is between neighboring lenses in a diagonal direction. The gap or space has a size of 0.2 to 0.7 micrometer. Two neighboring lenses in the horizontal direction and two neighboring lenses thereto in the same vertical direction define a quadrilateral space.