| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting semiconductor element for oscillating laser beams having a plurality of wavelengths with higher accuracy and excellent reproducibility. SOLUTION: The surface emitting semiconductor element includes a semiconductor substrate 10, a first reflecting mirror 12 provided on the front surface of the semiconductor substrate 10, an active layer 18 provided on the first reflecting mirror 12 to have a light emitting region 19, a second reflecting mirror 24 provided on the active layer 18 to have the surface for specifying a first resonator that can oscillate a laser in the single resonance mode at the gain spectrum width emitted from the light emitting region 19 provided in opposition to the first reflecting mirror 12 sandwiching the active layer 18, and a third reflecting mirror 38 provided on the rear surface of the semiconductor substrate 10 to have the surface for specifying a second resonator that can oscillate a laser in a plurality of resonance modes at the gain spectrum width emitted from the surface provided in opposition to the first reflecting mirror 12 sandwiching the semiconductor substrate 10. COPYRIGHT: (C)2008,JPO&INPIT
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