| 摘要 |
PROBLEM TO BE SOLVED: To observe a substrate with high accuracy, using a compact constitution, even if a thin plate-like substrate that is easily apt to produce warpages or vibrations is used as a specimen, in a substrate inspection device. SOLUTION: The substrate inspection device is equipped with a substrate-holding mechanism 50 for holding the peripheral edge part of the substrate 3 which is a specimen; a substrate inspection part 6 held so as to be made movable, with respect to the substrate holding-mechanism 50 at the position facing the substrate 3 held to the substrate holding mechanism 50 and moved along the substrate surface 3a of the substrate 3 to observe the substrate 3 at each fixed observation range; and a movement-regulating part which is moved, in matching with the movement destination of the substrate inspection part 6, makes the position-regulating force for regulating the position in the thickness direction of the substrate 3 act on the vicinity region outside the observation range, and regulating the movement in the thickness direction of the substrate 3 within the observation range. COPYRIGHT: (C)2008,JPO&INPIT
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