| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity sensor device constituted so as to reduce the variations in the output characteristics due to the effect of foreign matter exerted on a humidity-sensitive film to detect the humidity accurately. SOLUTION: The humidity sensor device 100 includes a sensor chip 200, wherein an electrode pad 230 is provided on a humidity-sensitive film forming surface, a circuit board 300 having a land 320 provided on its surface, the bump electrode 400 provided on the electrode pad 230 to electrically connect the electrode pad 230 and the land 320 and an underfill 500 for embedding the gap between the opposed surfaces of the sensor chip 200 and the circuit board 300. Of the underfill 500, the arranging region, excluding the peripheral region of the jointing parts of at least the electrode pad 230, the bump electrode 400 and the land 320 in the underfill 500 contain the same main components as those of the main components which constitute the humidity-sensitive film 216. COPYRIGHT: (C)2008,JPO&INPIT
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