| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust collecting apparatus which generates small noises, and hardly damages a dust collecting bag in a polishing operation. SOLUTION: The dust collecting apparatus for a dust sucking type polishing device comprises: an outer case 21 having a suction hole 24 and discharge holes 25; an aspirator 22 attached to the suction hole 24 of the outer case so that a discharge port 26 is located inside the outer case 21, and that a blow port 27 and a suction port 28 are located outside the outer case; and a dust collecting bag 23 which is arranged inside the outer case, and is attached to the discharge port 26 of the aspirator so as to introduce the air flow inside from the aspirator 22. COPYRIGHT: (C)2008,JPO&INPIT
|
