| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon carbide sintered body heater with a superb soaking property and high purity, and to provide its manufacturing method. <P>SOLUTION: The silicon carbide sintered body heater is provided with a heating element made of a silicon carbide sintered body with a bulk density of 3.0 g/cm<SP>3</SP>or more and a thermal conductivity of 200 w/m×k or more, and a pair of electrodes made of a silicon carbide sintered body with a bulk density of 2.2 g/cm<SP>3</SP>or less and a thermal conductivity of 100 w/m×k or less for raising a heating element through electricity conduction. The heating element and the electrodes are integrally jointed through a silicon carbide sintered body obtained by heating and sintering a bonding material. <P>COPYRIGHT: (C)2008,JPO&INPIT |
