| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce the influence due to thermal distortions to the diaphragm for pressure receiver, without having to provide a cooling mechanism, in a pressure sensor with the diaphragm for receiving the pressure to be measured. <P>SOLUTION: The diaphragm 20 for receiving pressure is constituted of a first diaphragm 20a for constituting a pressure receiving surface 21; a second diaphragm 20b, positioned nearer to a pressure transfer member 60 than the first diaphragm 20a; and an oil 20c filled in between the first and the second diaphragms 20a and 20b. Thus, the pressure to be measured from the first diaphragm 20a is transferred to the second diaphragm 20b through the oil 20c, and then the pressure is made to transfer from the second diaphragm 20b to the pressure transfer member 60. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
