| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stage control device which remotely controls a stage quickly. <P>SOLUTION: In the pattern correction device, when the button on a mouse 5 is pressed with the pointer 14 located on arbitrary coordinate P1 or P2 of a coordinate system 12 or 13 displayed on a screen 10 of a display device 4, an arrow mark 15 or 16 is displayed between the original point O1 or O2 and the relevant coordinate P1 or P2. The stage 2 or 3 moves in the direction of the arrow mark 15 or 16 at the speed corresponding to the length of the arrow mark 15 or 16. Thereby, the speed and direction of the movement of the stage 2 or 3 can be indicated simultaneously without the use of a joystick. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
