| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming device where occurrence of foreign matters is controlled at the time of forming an orientation film on a substrate and the orientation film can sufficiently be formed. SOLUTION: A film forming device is provided with a first room which stores the substrate and in which an orientation film can be formed on the stored substrate, a material supply part which is disposed in the first room and can supply a material for forming the orientation film on the substrate, a holding device which is arranged in the first room and attachably/detachably holds a prescribed member so that the prescribed member is disposed between the material and the substrate, a cleaning system which is installed in a position apart from the first room and can clean the prescribed member and a transportation system for transporting the prescribed member between the holding device of the first room and the cleaning system. COPYRIGHT: (C)2008,JPO&INPIT
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