NANO ELECTROMECHANICAL INTEGRATED-CIRCUIT BANK AND SWITCH
摘要
<p>A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micron excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.</p>
申请公布号
WO2008036845(A2)
申请公布日期
2008.03.27
申请号
WO2007US79078
申请日期
2007.09.20
申请人
TRUSTEES OF BOSTON UNIVERSITY;MOHANTY, PRITIRAJ;BADZEY, ROBERT L.