| 摘要 |
<P>PROBLEM TO BE SOLVED: To degrade and remove organic substances with which a clean room environment is contaminated. <P>SOLUTION: A first oxygen cluster layer 3, a photocatalytic layer 4, a second oxygen cluster layer 5, and a chemical filter 6 are arranged and inserted, in the order, in an air duct 2 for circulating air in a clean room 1. The first oxygen cluster layer 3 supplies generated (O<SP>-</SP>) to the photocatalytic layer 4. The photocatalytic layer 4 degrades the organic substances in the air by the action of active oxigen species generated by irradiation with ultraviolet rays and a large amount of (O<SP>-</SP>) ions supplied from the first oxygen cluster layer 3. The second oxygen cluster layer 5 degrades the organic substances remaining after passage through the photocatalytic layer 4. The chemical filter 6 catches the oxides of the degraded products generated by the degradation of the organic substances, and removes the oxides from the air. <P>COPYRIGHT: (C)2008,JPO&INPIT |
