发明名称 PUSH-UP DEVICE OF SEMICONDUCTOR CHIP
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a push-up device of a semiconductor chip which can precisely position a push-up pin to a projecting hole formed at a cap. <P>SOLUTION: The push-up device of the semiconductor chip is equipped with: a movable shaft 21 whose end is provided with a push-up pin 31; and a device body 14 comprising a base 16 having a through hole 15 which movably penetratingly supports the movable shaft, and a cap 33 attached to a top of the base 16 in which there is formed a projecting hole 34 through which the push-up pin projects at the end thereof, wherein there are formed a plurality of screw holes 41 at predetermined intervals in the hoop direction at the lower end of the cap, and a conical engaging hole 39 with which the end of a setscrew 42 is engaged is formed on the external peripheral face of an upper end of the base, while the setscrew whose end is conically formed to be screwed in the screw hole. <P>COPYRIGHT: (C)2008,JPO&INPIT</p>
申请公布号 JP2008071969(A) 申请公布日期 2008.03.27
申请号 JP20060249939 申请日期 2006.09.14
申请人 SHIBAURA MECHATRONICS CORP 发明人 IZUMI YOSHIHIRO
分类号 H01L21/67;H01L21/301;H01L21/52 主分类号 H01L21/67
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