| 摘要 |
A high purity ZrB<SUB>2 </SUB>powder having a purity of 99.9 wt % or higher excluding C and gas components, and a manufacturing method of such high purity ZrB<SUB>2 </SUB>powder, including the steps of: subjecting a Zr sponge raw material to electron beam melting and casting to prepare an ingot having a purity of 99.9 wt % or higher; cutting the ingot into a cut powder and hydrogenating the cut powder into ZrH<SUB>2</SUB>; pulverizing and dehydrogenating the resultant product into a Zr powder and oxidizing the Zr powder at a high temperature in an oxygen atmosphere into a ZrO<SUB>2 </SUB>fine powder; and mixing the ZrO<SUB>2 </SUB>fine powder with B having a purity of 99.9 wt % or higher so as to reduce ZrO<SUB>2 </SUB>and obtain a ZrB<SUB>2 </SUB>powder having a purity of 99.9 wt % or higher. Purity of the ZrB<SUB>2 </SUB>powder for use in sintering is made to be 99.9 wt % or higher, which is required in the manufacture of a ZrB<SUB>2 </SUB>single crystal substrate with the high frequency induction heating FZ method (Floating Zone Method), and it is thereby possible to obtain a high purity ZrB<SUB>2 </SUB>powder and the manufacturing method thereof enabling the enlargement of a ZrB<SUB>2 </SUB>single crystal substrate and reduction in the manufacturing costs associated therewith.
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