| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly precisely perform measurement of a movement locus of a movable body by an extremely simple and inexpensive structure. <P>SOLUTION: The positions of markers m1, m2, to mk are measured by moving an exposure stage 18 in the direction of an arrow Y, after a scale 13 on which the markers m1, m2, to mk are formed is installed with a plate 15a side upside on the exposure stage 18. Subsequently, the scale 13 is reversed and is installed with its plate 15b side upside on the exposure stage 18, and after that the positions of the markers m1, m2, to mk are similarly measured, and by computing the average value of these positions a movement locus in the direction of the arrow Y of the exposure stage 18 is acquired. <P>COPYRIGHT: (C)2008,JPO&INPIT |
