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发明名称
SPEKTROSKOPISCHES ELLIPSOMETER
摘要
申请公布号
DE69938134(D1)
申请公布日期
2008.03.27
申请号
DE19996038134
申请日期
1999.07.08
申请人
VERITY INSTRUMENTS INC.
发明人
FLUCKIGER, DAVID U.;KUENY, ANDREW W.
分类号
G01N21/21;G01J4/04
主分类号
G01N21/21
代理机构
代理人
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