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经营范围
发明名称
MACHINE FOR TRANSFERRING WAFER
摘要
申请公布号
KR100817714(B1)
申请公布日期
2008.03.27
申请号
KR20030065976
申请日期
2003.09.23
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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