发明名称 METHOD OF DETECTING FILM PASTING STATUS
摘要 <P>PROBLEM TO BE SOLVED: To correctly detect the pasting status of a translucent film in a chip. <P>SOLUTION: Image information of a chip 1 is acquired in step S1, an image to be recognized is extracted on the basis of binarized data of the image information in step S2, and a coarsely detected film region of the translucent film 2 is extracted in step S3. A plurality of divided contour lines 8 divided by a pattern 5 in a right side of the coarsely detected film region are acquired in step S4, a plurality of smooth contour lines 9 are acquired by feature extraction in step S5, a folded portion of coordinates is removed in step S6, and the smooth contour lines 9 are coupled to acquire an entire contour line 10 in step S7. A contour line 11 complying to standards is acquired in step S8, and an approximated right side 12 is acquired on the basis of the contour line 11 complying to the standards in step S9. The steps S4-S9 are repeatedly executed for each side of the coarsely detected film region to acquire approximated bottom, left and top sides 13, 14 and 15, and the position and profile of the translucent film 2 are decided on the basis of each of approximated sides 12-15 in step S10. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008071780(A) 申请公布日期 2008.03.27
申请号 JP20060246261 申请日期 2006.09.12
申请人 SHIBUYA KOGYO CO LTD 发明人 KATAGIRI SHO
分类号 H01L21/52;G06T1/00;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/52
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