| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus which forms an oriented film having desired qualities without performing a rubbing treatment. SOLUTION: The film-forming apparatus is equipped with: a first holding member for holding solid article which has a holding surface opposed to a first region on the surface of a solid article being an organic material for forming the oriented film; a treating member having a treating surface contactable with a second region on the surface of the solid article; a first temperature adjusting device able to adjust the temperature of the treating surface; and a second holding member for holding a substrate with a prescribed positional relation with respect to the contact region where the second region and the treating surface are in contact with each other. The film-forming apparatus forms the oriented films comprising the organic material on the substrate, by supplying a material generated from the solid article by bringing the treating surface heated by the first temperature adjusting device into contact with the second region. COPYRIGHT: (C)2008,JPO&INPIT
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