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经营范围
发明名称
METHOD FOR REDUCING ROUGHNESS OF A THICK INSULATING LAYER
摘要
申请公布号
EP1902463(A1)
申请公布日期
2008.03.26
申请号
EP20060777736
申请日期
2006.07.12
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
DAVAL, NICOLAS;KERDILES, SEBASTIEN;AULNETTE, CECILE
分类号
H01L21/762
主分类号
H01L21/762
代理机构
代理人
主权项
地址
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