METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENTS

摘要

This invention relates to a method for producing vapor-deposited films of good quality for organic El elements uniformly and rapidly in high productivity by electromagnetic induction heating of a container to which the raw material is introduced. The device of this invention for vapor deposition of films for organic EL elements vaporizes an organic material 5 in a container 2 and deposits the material in thin film on the surface of a film-forming substrate 6 and comprises a container 2 constructed of a material capable of generating heat by electromagnetic induction and a means for heating said container by electromagnetic induction. This invention also relates to a method for producing organic EL elements by the use of said device. It is possible to introduce the organic material to said container 2 constructed of a material capable of generating heat by electromagnetic induction or to introduce the organic material together with a filling up structure constructed of a material capable of generating heat by electromagnetic induction.