Apparatus of electrostatic chuck with He feed-through,申请号KR20060052203-传众专利搜索

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发明名称	Apparatus of electrostatic chuck with He feed-through
摘要
申请公布号	KR100816526(B1)	申请公布日期	2008.03.24
申请号	KR20060052203	申请日期	2006.06.09
申请人		发明人
分类号	H01L21/687;H01L21/02;H01L21/3065	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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