| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide novel and useful techniques for purging the inside of a container, that houses an original plate or a substrate therein, using a purge gas. <P>SOLUTION: An apparatus for purging the inside of a container 4 for housing an original plate 5 or a substrate therein with purge gases includes a feed means 12 for feeding a purge gas to a feed port 1 provided in the container, and an exhausting means 12 for exhausting the gas from an exhaust port 2 provided in the container. Furthermore, the apparatus is constituted to periodically change, at least either the flow rate of the purge gas fed to the feed port or the flow rate of the gas exhausted from the exhaust port. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
