| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the deformation quantity of deformation such as a warp that occurs in a material to be machined such as a glass material. <P>SOLUTION: The method comprises applying a dry film onto the both surfaces of glass substrates 10, 20, 30, forming openings having a predetermined pattern in the one dry film of each of glass substrates 10, 20, 30 by exposing and developing the pattern, making grooves along the opening pattern on the glass substrates 10, 20, 30 by a sand blasting method, then immersing the glass substrates 10, 20, 30 in a state having the dry film attached thereon into an etching liquid, etching the wall parts of the grooves, then supporting a catalyst in the grooves, and adhering the glass substrates 10, 20, 30. <P>COPYRIGHT: (C)2008,JPO&INPIT |
