| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the reliability of a multilayer structure with an increase in the production efficiency. <P>SOLUTION: A piezoelectric element 17 formed on the plane of a diaphragm opposite to a pressure chamber 12 includes a piezoelectric member 31, consisting of an upper piezoelectric member 34 and a lower piezoelectric member 35 stacked each other, and an electrode layer 33, 36, 37 for generating an electric field applied to the piezoelectric member 31. The piezoelectric element 17 is formed by stacking a lower common electrode 37, a lower piezoelectric member 35, a driving electrode 33, and an upper common electrode 36 in this order from the diaphragm 14 side. The width of the upper piezoelectric member 34 is formed not less than that of the lower piezoelectric member. <P>COPYRIGHT: (C)2008,JPO&INPIT |
