| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid injection head alignment unit which can perform high precision alignment even if a distance between a reference mark and an alignment mark is long. SOLUTION: The alignment unit has: a mask 410 being a transparent member provided with a reference mark 401 which is aligned with an alignment mark 22; a spacer jig 430 arranged between a fixed plate 250 and the mask 410 in such a manner that its one surface abuts on the fixed plate 250 and the other surface abuts on the mask 410 so that the reference mark 401 and the alignment mark 22 are faced with each other via a space; and a bifocal microscope 500 constituted such that an optical axis L is directed toward the alignment mark 22 from the side opposite to the spacer jig of the mask 410 via the space, that one optical system 501 sharing the optical axis L is focused on the alignment mark 22, and that the other optical system 502 is focused on the reference mark 401. COPYRIGHT: (C)2008,JPO&INPIT
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