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发明名称
摘要
申请公布号	JP2008508430(A)	申请公布日期	2008.03.21
申请号	JP20070524731	申请日期	2004.08.04
申请人		发明人
分类号	C23C16/503;H01L21/205	主分类号	C23C16/503
代理机构		代理人
主权项
地址

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