| 摘要 |
<p>A substrate coating apparatus is provided to increase productivity and yield of nozzle replacement, and to reduce its weight, since a pair of nozzle bodies is made of ceramic. A substrate coating apparatus comprises a stage(100), a nozzle part(200), a and driving part(300). A substrate(G) is mounted on the stage. The nozzle part, located on an upper side of the stage, comprises a pair of ceramic nozzle bodies(210,220) that are assembled to each other. The pair of nozzle bodies has a sidewall therebetween, wherein one nozzle body is overlapped on at least a part of the other nozzle body. The driving part moves the nozzle part, having at least one of the nozzle bodies secured thereto.</p> |
