| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron beam size measurement device and method thereof capable of measuring the specimen precisely while keeping the potential of the surface of the specimen constant. <P>SOLUTION: The electron beam size measurement device includes the electron beam irradiating means for irradiating the surface of the specimen with the electron beam, the stage 5 for mounting the specimen 7, the photoelectron generating electrode 52 arranged opposite to the specimen 7, the ultraviolet ray irradiation means 53 for irradiation with the ultraviolet ray, and the control means 20 for making the surface potential of the specimen 7 0 [V] by impressing the voltage for supplying the energy corresponding to the difference of photo electron energy which is radiated from the specimen 7 to the photoelectron formation electrode 52 and the energy of the photoelectrons radiated by the photoelectron formation electrode 52, wherein the specimen 7 and the photoelectron formation electrode 52 are made to radiate the photoelectron by making the ultraviolet ray irradiating means 53 irradiate for a prescribed time. The control means 20 measures the size of the specimen 7 after making the surface potential of the specimen 7 constant. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
