发明名称 METHOD FOR MAKING A THIN FILM LAYER
摘要 A method of making a patterned layer comprises directing a beam of vaporized material toward a reflector such that the beam of vaporized material impinges an impingement surface of the reflector and is redirected from the reflector through one or more apertures in a shadow mask and onto a deposition substrate to form a patterned material layer.
申请公布号 WO2007021544(A3) 申请公布日期 2008.03.13
申请号 WO2006US30067 申请日期 2006.08.02
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 HAASE, MICHAEL A.;BAUDE, PAUL, F.;HEMMESCH, ERIC, W.
分类号 C23C14/04;C23C14/12;C23C14/24 主分类号 C23C14/04
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