| 摘要 |
A substance adsorption detection method and a sensor utilizing amounts of change in the optical characteristic of a sensitive thin film with respect to the adsorbed amount of a substance to be detected. A clad 4 , a core 5 , and a thin film 7 for detecting an adsorbed substance are sequentially stacked on a crystal oscillator 10 to constitute an optical waveguide layer 12 and a gas adsorption member 11 . An incoming light prism 8 and an outgoing light prism 9 are provided on the surface of the core 5 . Changes in the adsorbed mass of the target substance and in the optical characteristic involved can be detected accurately and simultaneously by utilizing a change in outgoing light originating from a change in propagation loss and a change in the oscillation characteristic of the oscillator 10 , both caused by adsorption of the target substance on the core surface.
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