发明名称 SEMICONDUCTOR DEVICE, AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and the manufacturing method of the same having a fin transistor capable of suppressing OFF current and connection leak. SOLUTION: The semiconductor device is provided with the fin transistor equipped with an active region 100a defined so as to have a crank shape by an STI (shallow trench isolation) region 15 formed on a semiconductor substrate, and having an upper surface higher than the upper surface of the STI region; a source region and drain region 20 formed on both ends of the active region 100a with the crank shape, a channel region formed on a region pinched by the source region 20 and the drain region 20 in the active region 100a, and a gate electrode which covers the upper surface and the side surfaces of one part of the central part fa and both sides fb, fc of the active region 100a including the channel region. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008060219(A) 申请公布日期 2008.03.13
申请号 JP20060233499 申请日期 2006.08.30
申请人 ELPIDA MEMORY INC 发明人 MIKASA NORIAKI
分类号 H01L29/78;H01L29/41;H01L29/417;H01L29/423;H01L29/49 主分类号 H01L29/78
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