发明名称 MANUFACTURING METHOD OF ORGANIC THIN-FILM TRANSISTOR, AND THE ORGANIC THIN-FILM TRANSISTOR MANUFACTURED THEREBY
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic thin-film transistor having high production efficiency under an atmospheric pressure and superior in transistor characteristics, and to provide the organic thin-film transistor manufactured by the manufacturing method. SOLUTION: The organic thin-film transistor has a gate electrode, an insulating layer, source and drain electrodes, and an organic semiconductor layer on a supporter. In the manufacturing method of the organic thin-film transistor, atmospheric pressure plasma processing is carried out on a substrate on which the source and drain electrodes have previously been patterned, and the surfaces of the electrodes are processed with an organic compound, having a group chemically bonded to a metal forming each of the source and drain electrodes. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008060115(A) 申请公布日期 2008.03.13
申请号 JP20060231807 申请日期 2006.08.29
申请人 KONICA MINOLTA HOLDINGS INC 发明人 TAKEMURA CHIYOKO;OKUBO YASUSHI;SUGIZAKI REIKO;HIRAI KATSURA
分类号 H01L29/786;H01L21/336;H01L51/05;H01L51/40 主分类号 H01L29/786
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