| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin cleaner capable of positively preventing readhesion of mist on a substrate to be cleaned. SOLUTION: An exhaust duct 12 for an nozzle is provided around a jetting nozzle 11. An air path 7, communicating with an exhaust duct 8 is provided around a substrate chuck 3 of a spin 15. The mist near the jetting nozzle 11 is discharged instantaneously by the exhaust duct 12, and mist scattering around the cleaning target substrate B spinning on the spin 15 is discharged instantaneously by using the air path 7, and thus, readhesion of the mist on the cleaning target substrate B can be positively prevented. COPYRIGHT: (C)2008,JPO&INPIT
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